For time grating angular displacement sensor processing error affecting the measurement accuracy problems

Multi-position probe method is used to isolate multiple harmonic error and aimed to error correction.According to the field type time grating angular displacement sensor error characteristics

the 32 antipodal sensors are analyzed theoretically

64 multiple harmonics are isolated

and the influence of periodicity multiple harmonic error has been removed by multi-position probe method.The error correction method eliminated systematic error of manufacturing processes.The time grating angular displacement sensor precision reach expected targets of 2′.