Micro gear is an important part and the processing technology of micro gear is the key in MEMS.The manufacturing technology of micro gear including LIGA and quasi-LIGA

WEDM

micro plastic forming

micro etching method

micro cutting technology etc is presented.The result of micro gear processed by the technology is introduced and the advantage and shortcoming of the technology is analyzed.Micro cutting in forming micro gear is divided into the two ways such as micro forming milling and micro hobbing technology.Micro forming milling is a forming technology and micro hobbing is a generating method in processing micro gear.Contrasted with the other technology

the generating method used in hobbing process is better than the other methods because of the high quality

low cost

high efficiency

and can adopt with many kind of material of micro gear.Micro hobbing process is a good technology for the flexible batch processing of micro gear.