The fixed or rotatable metallic microstructure can be obtained by using quasi-LIGA technology.Quasi-LIGA technology is regarded as an important technology that can influence on the micro-machining of next century.The manufacture technology based on the quasi-LIGA technology is introduced

and the micro-gear samples with parameters of m=0.1mm and z=20 is fabricated.The structure of the micro gear is clear

the surface and the tooth profile curve are smooth

and the side-wall is vertical.