一种亚微米压电柔性微动系统设计及性能分析

张传伟; 李妞妞; 杨满芝; 郭卫; 许可俊; 葛红玉

doi:10.16578/j.issn.1004.2539.2020.06.012

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一种亚微米压电柔性微动系统设计及性能分析

设计计算 | 更新时间：2022-10-20

- 一种亚微米压电柔性微动系统设计及性能分析
- Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System
- 机械传动 2020年44卷第6期页码：68-72
- 作者机构：
  
  1.西安科技大学机械工程学院，陕西西安 710054
- 作者简介：
  
  张传伟（1974— ），男，安徽淮南人，工学博士，教授，博士生导师，研究方向为智能制造及新能源汽车。
  李妞妞（1995— ），女，陕西咸阳人，硕士研究生，研究方向为精密机械系统设计及控制。
  杨满芝（1986— ），男，河南固始人，工学博士，讲师，硕士生导师，研究方向为精密机械系统设计及控制。
- 基金信息：
  
  国家自然科学基金(51805428;51705417┫陕西省自然科学基础研究项目┣20018 JQ5205)
- DOI：10.16578/j.issn.1004.2539.2020.06.012
  中图分类号：
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张传伟,李妞妞,杨满芝等.一种亚微米压电柔性微动系统设计及性能分析[J].机械传动,2020,44(06):68-72.

Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu.Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System[J].Journal of Mechanical Transmission,2020,44(06):68-72.
张传伟,李妞妞,杨满芝等.一种亚微米压电柔性微动系统设计及性能分析[J].机械传动,2020,44(06):68-72. DOI： 10.16578/j.issn.1004.2539.2020.06.012.

Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu.Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System[J].Journal of Mechanical Transmission,2020,44(06):68-72. DOI： 10.16578/j.issn.1004.2539.2020.06.012.

摘要

为获得精密直线运动输出，设计一种压电柔性微驱动系统，系统由压电致动器及柔性微动机构组成，在压电致动器驱动下系统具有亚微米级定位精度。基于柔性铰链导向、传动原理，设计了一种精密柔性微动机构，在此基础上提出了压电柔性微驱动系统设计方案。采用有限元法对系统进行了运动学分析、强度分析、动态分析，分析结果显示，系统具有定位精度高（最大定位误差为0.24 μm）、强度性能好、动态性能优良等优势。研究对微驱动系统研究及应用具有一定的参考价值。

Abstract

In order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mechanism is designed based on the principle of flexible hinge guide and transmission，and on this basis， a design scheme of piezoelectric flexible micro drive system is proposed. The kinematics analysis，strength analysis and dynamic analysis of the system are accomplished by the finite element method. The analysis results show that the system has the advantages such as high positioning accuracy which the maximum positioning error is 0.24 μm，good strength performance and excellent dynamic performance. This study has a certain reference value for the research and application of micro drive system.

关键词

亚微米压电致动器柔性微驱动系统

Keywords

Sub-micronPiezoelectric actuatorFlexibilityMicro drive system

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