Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System

Zhang Chuanwei; Li Niuniu; Yang Manzhi; Guo Wei; Xu Kejun; Ge Hongyu

doi:10.16578/j.issn.1004.2539.2020.06.012

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Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System

Design· Calculation | 更新时间：2022-10-20

- Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System
- Journal of Mechanical Transmission Vol. 44, Issue 6, Pages: 68-72(2020)
- 作者机构：
  
  1.西安科技大学机械工程学院，陕西西安 710054
- 作者简介：
- 基金信息：
- DOI：10.16578/j.issn.1004.2539.2020.06.012
  CLC：
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张传伟,李妞妞,杨满芝等.一种亚微米压电柔性微动系统设计及性能分析[J].机械传动,2020,44(06):68-72.

Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu.Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System[J].Journal of Mechanical Transmission,2020,44(06):68-72.
张传伟,李妞妞,杨满芝等.一种亚微米压电柔性微动系统设计及性能分析[J].机械传动,2020,44(06):68-72. DOI： 10.16578/j.issn.1004.2539.2020.06.012.

Zhang Chuanwei Li Niuniu Yang Manzhi Guo Wei Xu Kejun Ge Hongyu.Design and Performance Analysis of a Sub-micron Piezoelectric Flexible Micro Drive System[J].Journal of Mechanical Transmission,2020,44(06):68-72. DOI： 10.16578/j.issn.1004.2539.2020.06.012.

摘要

为获得精密直线运动输出，设计一种压电柔性微驱动系统，系统由压电致动器及柔性微动机构组成，在压电致动器驱动下系统具有亚微米级定位精度。基于柔性铰链导向、传动原理，设计了一种精密柔性微动机构，在此基础上提出了压电柔性微驱动系统设计方案。采用有限元法对系统进行了运动学分析、强度分析、动态分析，分析结果显示，系统具有定位精度高（最大定位误差为0.24 μm）、强度性能好、动态性能优良等优势。研究对微驱动系统研究及应用具有一定的参考价值。

Abstract

In order to get the precision linear motion output，a piezoelectric flexible micro drive system that composed of piezoelectric actuators and flexible micro mechanism is designed，and the system has sub-micron positioning accuracy driven by piezoelectric actuator. A kind of precise flexible micro mechanism is designed based on the principle of flexible hinge guide and transmission，and on this basis， a design scheme of piezoelectric flexible micro drive system is proposed. The kinematics analysis，strength analysis and dynamic analysis of the system are accomplished by the finite element method. The analysis results show that the system has the advantages such as high positioning accuracy which the maximum positioning error is 0.24 μm，good strength performance and excellent dynamic performance. This study has a certain reference value for the research and application of micro drive system.

关键词

亚微米压电致动器柔性微驱动系统

Keywords

Sub-micronPiezoelectric actuatorFlexibilityMicro drive system

references

XU Q S.Rotary flexure micropositioning stage with large rotational range:US 9400378[P].2016-07-26.

ZHU X B，WEN Z J，CHEN G Z，et al.A decoupled flexure-based rotary micropositioning stage with compact size[J].Proceedings of the Institution of Mechanical Engineers，2018，232（22）：4167-4179.

WANG F，LIANG C，TIAN Y，et al.A flexure-based kinematically decoupled micropositioning stage with a centimeter range dedicated to micro/nano manufacturing[J].IEEE/ASME Transactions on Mechatronics，2016，21（2）：1055-1062.

MASHIMO T.Miniature preload mechanism for a micro ultrasonic motor[J].Sensors and Actuators A Physical,2017,257：106-112.

YANG Y C，WANG X，ZHANG J W，et al.Automaticphase-locked control of grating tiling[J].Optics and Lasers Engineering，2012，50（2）：262-267.

ZENG S Y，BLUNT L.Experimental investigation and analytical modelling of the effects of process parameters on material removal rate for bonnet polishing of cobalt chrome alloy[J].Precision Engineering，2013，38（2）：348-355.

ZENIA S，AYED L B，NOUARI M D.Numerical prediction of the chip formation process and induced damage during the machining of carbon/epoxy composites[J].International Journal of Mechanical Sciences，2015（90）：89-101.

AHN H J.Eddy current damper type reaction force compensation mechanism for linear motor motion stage[J].International Journal of Precision Engineering and Manufacturing-Green Technology，2016，3（1）：67-74.

ZHENG E L，ZHU R，ZHU S H，et al.A study on dynamics of flexible multi-link mechanism including joints with clearance and lubrication for ultra-precision presses[J].Nonlinear Dynam，2016，83（1/2）：137-159.

MAJUMDAR R，PAPROTNY L.Configurable post-release sress-engineering of surface micro-machined MEMS structures[J].Journal Microelectrmechani Systems，2017，6（3）：671-678.

DU C L，ZHANG Y，KONG A M，et al.High-precision and fast response control for complex mechanical system[C]//Proceedings of 2016 Asia-Pacific Magnetic Recording Conference,July 13-15,2016,Seoul，South Korea.New York:IEEE，2016：1-5.

SHAO Z X，WU S，WU J，et al.A novel 5-DOF high-precision compliant parallel mechanism for large-aperture grating tiling[J].Mechanical Sciences，2017，8（2）：349-358.

HUANG H，LI J，ZHAO H，et al.On the correlation between the structure and one stepping characteristic of a piezo-driven rotary actuator[J].Microsystem Technologies，2016，22（12）：2821-2827.

SUN X，CHEN W，ZHOU R，et al.A decoupled 2-DOF flexure-based micropositioning stage with large travel raring[J].Robotica，2013，32（5）：677-694.

XU Q.Design and testing of a novel multi-stroke micropositioning system with variable resolutions[J].Review of Scientific Instruments，2014，85（2）：025002.

LI Z J，CUI T，ZHAO H W，et al.Quasi-static contact analysis of an inchworm-type piezoelectric-driven rotary actuator via finite element method[J].Applied Mechanics & Materials，2014，551：115-120.

BASSING D，BRAEUER A.The lag between micro-and macro-mixing in compressed fluid flows[J].Chemical Engineering Science，2017，163：105-113.

ZHANG L Y，GAO J，CHEN X，et al.Implementation and experiment of an active vibration reduction strategy for macro-micro positioning system[J].Precision Engineering，2017，51：319-330.

YOU C，LEE M H，LEE H J，et al.The effect of macro/micro combination pore structure of biphasic calcium phosphate scaffold on bioactivity[J].Ceramics International，2017，43（4）：3540-3546.

TANG W，LIN D，YU Y M，et al.Bioinspired trimodal macro/micro/nano-porous scaffolds loading rhBMP-2 for complete regeneration of critical size bone defect[J].Acta Biomaterialia，2016，32（1）：309-323.

XU Q S.Design and development of a novel compliant gripper with integrated position and grasping/interaction force sensing[J].IEEE Transactions on Automation Science and Engineering，2015，14(3):1415-1428.

XU Q S.Design of a large-range compliant rotary micropositioning stage with angle and torque sensing[J].IEEE Sensors Journal，2015，15（4）：2419-2430.

ZHU D C，FENG Y P.Structure design of a 3-DOF UPC type rotational fully spatial compliant parallel manipulator[J].International Journal of Advancements in Computing Technology，2013，5（8）：70-81.

PAN R，ZHAO X J，LIU P T，et al.Micro-mechanism of polygonization wear on railroad wheels[J].Wear，2017，392：213-220.

FAN X J，SUN M M，LIN Z H，et al.Automated noncontact micromanipulation using magnetic swimming microrobots[J].IEEE Transactions on Nanotechnology，2018，17(4)：666.

FENELON M A A,FURUKAWA T.Design of an active flapping wing mechanism and a micro aerial vehicle using a rotary actuator[J].Mechanism and Machine Theory，2010，45（2）：137-146.

YANG S，XU Q.Design of a microelectromechanical systems microgripper with integrated electrothermal actuator and force sensor[J].International Journal of Advanced Robotic Systems，2016，13（5）：1-10.DOI:10.1177/172988141663375http://dx.doi.org/10.1177/172988141663375.

PARK H J，LEE D S，PARK J H.Ultraprecision positioning system for servo motor-piezo actuator using the dual servo loop and digital filter implementation[J].Machine Tools and Manufacture，2001，41（1）：51-63.

HAMMER R，HOLLIS R L，AN C H，et al.Design and control of an air-bearing supported three degree-of-freedom fine positioner[C]//Proceedings of IEEE International Conference on Robotics & Automation,May 12-14,1992,Nice,France.New York:IEEE,1992：677-684.

FUJITA T，MATSUBARA A，KONO D，et al.Dynamic characteris-tics and dual control of a ball screw drive with integrated piezoelectric actuator[J].Precision Engineering，2010，34（1）：34-42.

KANG D，KIM K，KIM D，et al.Optimal design of high precision XY-scanner with nanometer-level resolution and millimeter-level working range[J].Mechatronics，2009，19（4）：562-570.

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