Design and FEA Verification of Flexure Hinge for a Precision Platform

Chang Xu; Gao Sitian; Li Dongsheng; Li Qi; Shi Yushu; Qian Xiaoli

doi:10.16578/j.issn.1004.2539.2017.10.013

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Design and FEA Verification of Flexure Hinge for a Precision Platform

更新时间：2022-10-20

- Design and FEA Verification of Flexure Hinge for a Precision Platform
- Vol. 41, Issue 10, Pages: 70-74(2017)
- 作者机构：
  
  1. 中国计量大学
  2. 中国计量科学研究院
- 作者简介：
- 基金信息：
- DOI：10.16578/j.issn.1004.2539.2017.10.013
  CLC：
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[1]常旭,高思田,李东升,李琪,施玉书,钱晓力.一种精密平台的柔性铰链设计和有限元验证[J].机械传动,2017,41(10):70-74.

Chang Xu, Gao Sitian, Li Dongsheng, et al. Design and FEA Verification of Flexure Hinge for a Precision Platform. [J]. 41(10):70-74(2017)
[1]常旭,高思田,李东升,李琪,施玉书,钱晓力.一种精密平台的柔性铰链设计和有限元验证[J].机械传动,2017,41(10):70-74. DOI： 10.16578/j.issn.1004.2539.2017.10.013.

Chang Xu, Gao Sitian, Li Dongsheng, et al. Design and FEA Verification of Flexure Hinge for a Precision Platform. [J]. 41(10):70-74(2017) DOI： 10.16578/j.issn.1004.2539.2017.10.013.

摘要

精密平台是一种能够提供微位移的高精度工作平台,柔性铰链作为传动机构,在精密平台设计中广泛应用。柔性铰链是决定平台性能的关键,柔性铰链的结构形式和尺寸参数影响着定位精度的高低。设计了一种叠加支链形式的柔性铰链结构,推导了基于该柔性铰链的二维精密平台的工作刚度、耦合刚度、耦合系数、铰链应力等性能指标的解析公式,并采用了有限元软件对性能指标进行了验证。仿真表明,两者具有良好的一致性,为应用于精密平台的柔性铰链设计提供参考。

Abstract

The precision platform is a kind of high precision working platform which can provide the micrometer displacement. In precision platform design,flexible hinge structure is widely used as mechanism of transmission. The flexible hinge plays the key role in determining the performance of the platform,the structure shape and size parameters of the flexible hinge affect the positioning accuracy. A novel flexible hinge structure constructed by superimposed branched chain is described,and the working stiffness,coupling stiffness,coupling coefficient as well as hinge stress performance of the platform based on this flexible hinge are calculated.In order to testify the accuracy of the results,finite element analysis software is utilized to cross validation. At last,it is showed that both the calculation and the simulation results have good consistency,which provides a reference for the design of flexure hinge used in precision platform.

关键词

柔性铰链叠加支链刚度耦合性应力有限元分析

Keywords

Flexure hingeSuperimposed branched chainStiffnessCoupling propertyStressFinite element analysis

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