In order to increase CO2 laser micromachining table position accuracy

regression modeling and forecasting methods of the linear motor position error are put forward based on LSSVM.LSSVM has excellent learning and statistical functions.Predicting model is founded by kernel function.Learning machine is trained with learning sample used known data.Further error of the system is tested and predicted with testing sample.Position error prediction about various speeds and accelerations are put forward based on LSSVM introduction radial group kernel function

and error compensation is processed.Research results indicate that the use of radial basis function of the LSSVM can improve forecast accuracy

made the forecast better results.